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Departments >> Faculty of Engineering >> Department of Electrical-Electronic-Communication Engineering >> Chair of Electron Devices >>

  Übung zu Optical Lithography

Lecturer
PD Dr. rer. nat. Andreas Erdmann

Details
Übung
Online
2 cred.h, Sprache Deutsch, Für Master AOT verpflichtende Zusatzveranstaltung, für andere Studiengänge freiwillig
Zeit: Fri 16:15 - 17:45; n.V.

Fields of study
WF AOT-GL ab 1
PF NT-MA 1
WF EEI-BA ab 5
WF EEI-MA ab 1

Additional information
Expected participants: 1

Assigned to: Optical Lithography: Technology, Physical Effects, and Modelling

Verwendung in folgenden UnivIS-Modulen
Startsemester WS 2021/2022:
Kernfach Mikro- und Nanostrukturforschung für MWT (MNF_M1_MWT)
Optical Lithography (OLITHO)
Top-Down Nanostrukturierung (Nano_Top_Down)

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