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Advanced Optical Technologies (Master of Science)
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Übung zu Halbleitertechnologie IV - Optical Lithography (HLT IV - LITHO-Ü)
Lecturer
PD Dr. rer. nat.
Andreas Erdmann
Details
Übung
2 cred.h
für FAU Scientia Gaststudierende zugelassen, Sprache Deutsch, Für Master AOT verpflichtende Zusatzveranstaltung, für andere Studiengänge freiwillig
Time and place: Thu 12:15 - 13:45,
0.111
; n.V.
Fields of study
WF AOT-GL ab 1
PF NT-MA 1
WF EEI-BA ab 5
WF EEI-MA ab 1
Additional information
Expected participants: 1
Assigned to:
Halbleitertechnologie IV - Optical Lithography: Technology, Physical Effects, and Modelling
Verwendung in folgenden UnivIS-Modulen
Startsemester SS 2022
:
Halbleitertechnologie IV - Optical Lithography (HLT IV - LITHO)
Optical Lithography (OLITHO)
Top-Down Nanostrukturierung (Nano_Top_Down)
Department:
Chair of Electron Devices
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